Multichip module supports and related methods

ABSTRACT

Implementations of a semiconductor device may include a first largest planar surface, a second largest planar surface and a thickness between the first largest planar surface and the second largest planar surface; and one of a permanent die support structure, a temporary die support structure, or any combination thereof coupled to one of the first largest planar surface, the second largest planar surface, the thickness, or any combination thereof. The first largest planar surface, the second largest planar surface, and the thickness may be formed by at least two semiconductor die. The warpage of one of the first largest planar surface or the second largest planar surface may be less than 200 microns.

BACKGROUND 1. Technical Field

Aspects of this document relate generally to semiconductor packages,such as wafer scale or chip scale packages. More specificimplementations involve packages including an encapsulating or moldcompound.

2. Background

Semiconductor packages work to facilitate electrical and physicalconnections to an electrical die or electrical component in the package.A protective cover or molding has generally covered portions of thesemiconductor packages to protect the electrical die or electricalcomponent from, among other things, the environment, electrostaticdischarge, and electrical surges.

SUMMARY

Implementations of a semiconductor device may include a first largestplanar surface, a second largest planar surface and a thickness betweenthe first largest planar surface and the second largest planar surface;and one of a permanent die support structure, a temporary die supportstructure, or any combination thereof coupled to one of the firstlargest planar surface, the second largest planar surface, thethickness, or any combination thereof. The first largest planar surface,the second largest planar surface, and the thickness may be formed by atleast two semiconductor die. The warpage of one of the first largestplanar surface or the second largest planar surface may be less than 200microns.

Implementations of semiconductor devices may include one, all, or any ofthe following:

The thickness may be between 0.1 microns and 125 microns.

The perimeter of at least two semiconductor die rectangular and a sizeof the at least two semiconductor die may be at least 6 mm by 6 mm.

The perimeter of the at least two semiconductor die may be rectangularand a size of the at least two semiconductor die may be 211 mm by 211 mmor smaller.

The permanent die support structure may include a mold compound.

The perimeter of the at least two semiconductor die may include a closedshape.

The one of the permanent die support structure, the temporary diesupport structure, or any combination thereof may include a perimeterincluding a closed shape.

The device may include a second permanent die support structure, asecond temporary die support structure, or any combination thereofcoupled to one of the first largest planar surface, the second largestplanar surface, the thickness, or any combination thereof.

The permanent die support structure, the temporary die supportstructure, or any combination thereof may include two or more layers.

Implementations of a die support structure may include a materialconfigured to be one of permanently coupled or temporarily coupled witha first largest planar surface, a second largest planar surface and athickness between the first largest planar surface and the secondlargest planar surface where the material may be configured to becoupled to one of the first largest planar surface, the second largestplanar surface, the thickness, or any combination thereof where thefirst largest planar surface, the second largest planar surface, and thethickness may be formed by at least two semiconductor die. The thicknessmay be between 0.1 microns and 125 microns.

Implementations of die support structures may include one, all, or anyof the following:

The material may be configured to reduce a warpage of one of the firstlargest planar surface or the second largest planar surface to less than200 microns.

The material may be a mold compound.

The material may be configured to be removable by one of exposure tolight, ultrasonic energy, peeling, etching, grinding, or any combinationthereof.

The material may include a perimeter including a closed shape.

The material may be a first portion of material and may include a secondportion of material configured to be coupled to one of the first largestplanar surface, the second largest planar surface, the thickness, or anycombination thereof.

Implementations of a method of forming a die support structure mayinclude one of permanently coupling or temporarily coupling a materialwith a first largest planar surface, a second largest planar surface, athickness between the first largest planar surface and the secondlargest planar surface, or any combination thereof. The first largestplanar surface, a second largest planar surface, and the thickness maybe formed by at least two or more semiconductor die. Implementations mayinclude reducing a warpage of one of the first largest planar surface orthe second largest planar surface to less than 200 microns through thematerial.

Implementations of a method of forming a die support structure mayinclude one, all, or any of the following:

The method may include removing the material using one of light,etching, peeling, ultrasonic energy, grinding, or any combinationthereof.

The method may include removing the material after bonding the at leasttwo or more die to one of a substrate, a leadframe, an additional die, alead, a redistribution layer, and any combination thereof.

The material may be a first portion of material and may include: one ofpermanently coupling or temporarily coupling a second portion ofmaterial with one of the first largest planar surface, the secondlargest planar surface, the thickness, or any combination thereof.

The second portion of material may be a second layer of material coupledover the first portion of material.

The foregoing and other aspects, features, and advantages will beapparent to those artisans of ordinary skill in the art from theDESCRIPTION and DRAWINGS, and from the CLAIMS.

BRIEF DESCRIPTION OF THE DRAWINGS

Implementations will hereinafter be described in conjunction with theappended drawings, where like designations denote like elements, and:

FIG. 1 is a top view of two separate semiconductor die;

FIG. 2 is a perspective view of the two semiconductor die of FIG. 1coupled together via an implementation of a permanent die supportstructure coupled with a lower largest planar surface of each of the twosemiconductor die;

FIG. 3 is a perspective view of the two semiconductor die of FIG. 1coupled with an implementation of a temporary die support structurecoupled with an upper largest planar surface of each of the twosemiconductor die;

FIG. 4 is a perspective view of the two semiconductor die of FIG. 1coupled with an implementation of a die support structure coupled at athickness of each of the two semiconductor die;

FIG. 5 is a perspective view of an implementation of a die supportstructure that includes a first portion and a second portion coupled toa largest planar surface of each of two semiconductor die;

FIG. 6 is a perspective view of an implementation of a die supportstructure that is coupled along a largest planar surface of threeseparate semiconductor die;

FIG. 7 is a perspective view of an implementation of an X-shaped diesupport structure coupled to five separate semiconductor die;

FIG. 8 is a top view of an implementation of an elliptically shaped diesupport structure coupled to four separate semiconductor die;

FIG. 9 is a top view of an implementation of an irregularly shaped diesupport structure coupled to two separate semiconductor die of differentsizes;

FIG. 10 is a side view of an implementation of a die support structurecoupled to two separate semiconductor die where the die support isthinner than the thickness of each of the two separate semiconductordie;

FIG. 11 is a side view of an implementation of a die support structurecoupled to two separate semiconductor die where the die support isthicker than the thickness of each of the two separate semiconductordie;

FIG. 12 is a top view of an implementation of a permanent die supportstructure coupled with a plurality of die;

FIG. 13 is a perspective view of the implementation of a permanent diesupport structure of FIG. 12 coupled in a power integrated module;

FIG. 14 is a perspective view of an implementation of a permanent diesupport structure coupled with a plurality of image sensor die;

FIG. 15 is a perspective view of the implementation of a permanent diesupport structure of FIG. 14 with an optically transmissive covercoupled over the plurality of image sensor die;

FIG. 16 is a top view of an implementation of a temporary die supportstructure with four die coupled thereto;

FIG. 17 is a top view of an implementation of a permanent die supportstructure with four die coupled therein;

FIG. 18 is a top view of an implementation of a permanent die supportstructure with four die coupled therein showing connection openingstherein;

FIG. 19 is a top view of an implementation of a permanent die supportstructure with four die coupled therein showing various connectionopenings therein;

FIG. 20 is a side view of an implementation of a temporary die supportstructure with two die coupled therein;

FIG. 21 is a side view of a permanent die support;

FIG. 22 is a side view of the permanent die support of FIG. 21 with aplurality of separate thinned die coupled thereto;

FIG. 23 is a side view of the permanent die support of FIG. 21 with aplurality of temporary die support structures coupled to each of theseparate thinned die;

FIG. 24 is a side view of a jig/mold/guide with a plurality of separatethinned die coupled therein;

FIG. 25 is a side view of the jig of FIG. 24 with two implementations oftemporary die support structures coupled to pairs of the plurality ofthinned die;

FIG. 26 is a side view of a jig illustrating a permanent die supportstructure coupled to three separate thinned die.

DESCRIPTION

This disclosure, its aspects and implementations, are not limited to thespecific components, assembly procedures or method elements disclosedherein. Many additional components, assembly procedures and/or methodelements known in the art consistent with the intended multichip modulesupports will become apparent for use with particular implementationsfrom this disclosure. Accordingly, for example, although particularimplementations are disclosed, such implementations and implementingcomponents may comprise any shape, size, style, type, model, version,measurement, concentration, material, quantity, method element, step,and/or the like as is known in the art for such multichip modulesupports, and implementing components and methods, consistent with theintended operation and methods.

Referring to FIG. 1, an implementation of two separate thinnedsemiconductor die 2 is illustrated. Various implementations of groups ofseparate thinned semiconductor die disclosed in this document may beformed from a wide variety of semiconductor substrate types, including,by non-limiting example, silicon, polysilicon, silicon-on-insulator,glass, sapphire, ruby, gallium arsenide, silicon carbide, and any othersemiconductor material type. Also, various implementations of groups ofseparate thinned semiconductor die may include die of any of a widevariety of shapes, including, by non-limiting example, rectangular,elliptical, triangular, polygonal, or any other closed shape. Thevarious implementations of groups of thinned separate semiconductor diedisclosed herein may include any of a wide variety of electronicdevices, including, by non-limiting example, integrated bipolar junctiontransistors (IGBTs), metal oxide semiconductor field effect transistors(MOSFETs), diodes, power semiconductor devices, any semiconductor devicedisclosed in this document, any combination thereof, or any other activeor passive semiconductor device or component, alone or in combination.As illustrated with reference to FIGS. 1 and 2, the two separatesemiconductor die 2, 4 each have an upper largest planar surface 6, 8and a lower largest planar surface 10, 12 with each having a thickness14, 16 between them.

In various implementations disclosed herein, the thickness 14, 16 of theseparate thinned semiconductor die may be between about 0.1 microns andabout 125 microns. In other implementations, the thickness may bebetween about 0.1 microns and about 100 microns. In otherimplementations, the thickness may be between about 0.1 microns andabout 75 microns. In other implementations, the thickness may be betweenabout 0.1 microns and about 50 microns. In other implementations, thethickness may be between about 0.1 microns and about 25 microns. Inother implementations, the thickness may be between about 0.1 micronsand about 10 microns. In other implementations, thickness may be between0.1 microns and about 5 microns. In other implementations, the thicknessmay be less than 5 microns.

The groups of separate various semiconductor die disclosed herein mayform multichip modules of various sizes and each of the die in themultichip modules may have various sizes (die sizes). Die size generallyrefers to measured principal dimensions of the perimeter of the shapeformed by a semiconductor die. For example, for a rectangular die thathas a perimeter shaped like a square, the die size can be represented byreferring to a height and width of the perimeter. In variousimplementations, the die size any one of the semiconductor die in amultichip module may be at least about 6 mm by about 6 mm. In otherimplementations, the die size may be smaller. In other implementations,the die size of at least one die in the semiconductor die may be about211 mm by about 211 mm or smaller. For a semiconductor die withperimeter that is not rectangular, the surface area of the largestplanar surface of the semiconductor die may be used as a representationof the die size.

One of the effects of thinning each of the separate semiconductor die isthat is that as the thickness decreases, the largest planar surfaces ofeach die may tend to warp or bend in one or more directions as thethinned material of the die permits movement of the material undervarious forces. Similar warping or bending effects may be observed wherethe die size becomes much larger than the thickness of the die for largedie above about 6 mm by about 6 mm or 36 mm² in surface area. Theseforces include tensile forces applied by stressed films, stress createdthrough backgrinding, forces applied by backmetal formed onto a largestplanar surface of the die, and/or forces induced by the structure of theone or more devices formed on and/or in the semiconductor die. Thiswarping or bending of the thinned separate semiconductor die can preventsuccessful processing of the die through the remaining operations neededto form a semiconductor package around the die to allow it to ultimatelyfunction as, by non-limiting example, a module, a desired electroniccomponent, processor, power semiconductor device, switch, or otheractive or passive electrical component. Being able to reduce the warpagebelow a desired threshold amount may permit the separate die to besuccessfully processed through the various operations, including, bynon-limiting example, die bonding, die attach, package encapsulating,clip attach, lid attach, wire bonding, epoxy dispensing, pin attach, pininsertion, module attach, or any other process involved in forming asemiconductor package. In various implementations the warpage of the diecoupled to the die support may need to be reduced to less than about 50microns measured across a largest planar surface of the die between ahighest and lowest point on the largest planar surface. In otherimplementations, by non-limiting example, where an assembly processinvolves Au—Si eutectic die attach, the warpage of the die coupled tothe die support may need to be reduced to less than about 25 micronswhen measured across a largest planar surface of the die. In otherimplementations, by non-limiting example, where a die attach processutilizing solder paste is used, the warpage of the die coupled to thedie support may need to be reduced to about 75 microns or less. Invarious implementations, the warpage of the die coupled to the diesupport may be reduced to below about 200 microns or less. Inimplementations where larger die are used, more warpage may be toleratedsuccessfully in subsequent packaging operations, so while values lessthan 25 microns may be desirable for many die, depending on die size,more warpage than about 25, than about 50, than about 75 microns, or upto about 200 microns may be capable of being tolerated.

In various implementations, the warpage may be measured using varioustechniques. For example, a capacitative scanning system with two probesthat utilize changes in the capacitance for each probe when a die orwafer is inserted into the gap between the probes to determine a waferthickness and/or position can be utilized to map the warpage of a die orwafer. An example of such a capacitive system that may be utilized invarious implementations may be the system marketed under the tradenamePROFORMA 300ISA by MTI Instruments Inc. of Albany, N.Y. In otherimplementations, the warpage may be measured by a laser profilometerutilizing confocal sensors marketed under the tradename ACUITY bySchmitt Industries, Inc. of Portland, Oreg. In other implementations,any of the following shape/profile measurement systems marketed byKeyence Corporation of America of Itasca, Ill. could be employed tomeasure die or wafer warpage: the reflective confocal displacementsensor system marketed under the tradename CL-3000, the 2D laserprofiling system marketed under the tradename LJ-V7000, or the 3Dinterferometric sensing system marketed under the tradename WI-5000.

Referring to FIG. 2, the two semiconductor die 2, 4 are illustratedcoupled together through an implementation of a permanent die supportstructure (permanent die support, die support, multichip die support,multichip module support, multichip support) 18 is illustrated coupledto the two semiconductor die 2, 4. In this implementation, the multichipdie support 18 is coupled to and coextensive with perimeters 20, 22 oflargest planar surfaces 6, 8 of the two semiconductor die 2, 4. However,and as described in this document, the shape of the perimeters 20, 22may each be a wide variety of shapes, including, by non-limitingexample, rectangular, triangular, polygonal, elliptical, circular, orany other closed shape. The permanent die support structure 18 works tosupport the two semiconductor die during die packaging operations.Furthermore, the permanent die support structure 18 may include two ormore portions, which will be described in this document.

While in the implementation illustrated in FIG. 2 the die supportstructure 18 is a permanent die support structure, in otherimplementations of die support structures disclosed in this document,the die supports structures may be temporary. Referring to FIG. 3, animplementation of a temporary multichip die support structure 24 coupledto the upper planar surfaces 26, 28 of two semiconductor die 30, 32 isillustrated. The temporary die support structure 24 is designed to beremovably/releaseably coupled to the die 30, 32 and reduce the warpageof each of the die during die packaging operations.

In the implementations illustrated in FIGS. 2 and 3, the permanent diesupport structure 18 and the temporary die support structure 24 eachinclude a material that is applied to the largest planar surface of eachdie of the thinned semiconductor die coupled to the dies support. Thematerial reduces the warpage of each of the thinned semiconductor die inany of a wide variety of ways, such as, by non-limiting example, havinga predetermined hardness value, having a predetermined stiffness value,having a predetermined Shore value, having a predetermined glasstransition temperature, having a predetermined cure strength, having apredetermined thickness, having a predetermined film stress, curing at aparticular temperature, curing with a particular temperature rampprofile, curing using specific light wavelengths, including one or morefillers, including one or more resins, or any other compound formationprocess parameter, mold compound ingredient, film parameter capable ofaffecting the warpage of the thinned semiconductor die. While a singlelayer of material is illustrated as being used as the permanentmultichip die support in FIG. 2 or the temporary multichip die supportin FIG. 3, in other implementations two or more layers of material maybe employed to form the die support which contain either the same ordifferent material compositions. These two or more layers may be appliedsimultaneously or sequentially in various implementations.

A wide variety of forms of materials may be employed in variousimplementations of temporary die supports, including, by non-limitingexample, a coating (which may be applied, by non-limiting example,through painting, sputtering, evaporating, electroplating, electrolessplating, or spraying or any other method of coating), a tape, a film, aprinted structure, a screen printed structure, a stencil printedstructure, an adhesive bonded structure, or any other material formcapable of being removably or releaseably coupled with the surface of asemiconductor die. A wide variety of material types may be employed invarious implementations of temporary die supports, including, bynon-limiting example, polyimides, polybenzoxazoles, polyethylenes,metals, benzocyclobutenes (BCBs), photopolymers, adhesives, and anyother material or combination of materials capable of being removably orreleaseably coupled with a semiconductor die.

In various implementations, the material of the permanent die supportsdisclosed in this document may be mold compounds. In theseimplementations, the mold compound is not a polyimide material or othermaterial generally specifically used to act as a passivating materialfor a semiconductor die surface. The mold compound may include any of awide variety of compounds, including, by non-limiting example,encapsulants, epoxies, resins, polymers, polymer blends, fillers,particles, thermally conductive particles, electrically conductiveparticles, pigments, and any other material capable of assisting informing a stable permanent supporting structure. In some implementationsthe mold compound may be non-electrically conductive (insulative). Inother implementations, the mold compound may be electrically conductive,such as an anisotropic conductive film. In such implementations wherethe mold compound is electrically conductive, the mold compound is not ametal, but rather is formed as a matrix containing electricallyconductive materials, such as, by non-limiting example, metal particles,graphene particles, graphite particles, metal fibers, graphene fibers,carbon fibers, carbon fiber particles, or any other electricallyconductive particle or fiber. In various implementations, the moldcompound may be a material which has a flexural strength of betweenabout 13 N/mm² to 185 N/mm². Flexural strength is the ability of themold compound to resist plastic deformation under load. Plasticdeformation occurs when the mold compound no longer will return to itsoriginal dimensions after experiencing the load. For thoseimplementations of permanent die support structures, flexural strengthvalues of the mold compound to be used may generally be selected so thatthe chosen mold compound has sufficient flexural strength at the maximumexpected operating temperature to avoid plastic deformation.

A wide variety of shapes and structures may be employed as permanent ortemporary multichip die support structures in various implementationsthat may employ any of the material types, material forms, materialparameters, or film parameters disclosed in this document to reduce thewarpage of a group of thinned die to any of the desired levels disclosedin this document.

Referring to FIG. 4, an implementation of a permanent die supportstructure 34 that is coupled at the thickness 36 of each semiconductordie 38, 40. In this implementation, the permanent die support structure34 extends continuously around the thickness/perimeter 36 of each of thesemiconductor die 38, 40. In this implementation, having the permanentdie support structure 34 around the thickness 36 of each of the die 38,40 may reduce the warpage of each of die 38, 40 to a desired level likeany disclosed in this document.

Referring to FIG. 5, an implementation of a permanent die supportstructure 42 is illustrated that includes two C-shaped or U-shapedportions, a first portion 44 and a second portion 46. The first portion44 and second portion 46 are separated by a gap along each side ofsemiconductor die 48, 50 which are coupled through the permanent diesupport structure 42. The material of the die support structure 42 inthis implementation is included in the first portion 44 and secondportion 46 and may be any material disclosed for use in a permanent diesupport structure disclosed in this document. In other implementations,the two C-shaped or U-shaped portions may alternatively be coupledacross or over the thickness the group of semiconductor die. In otherimplementations, the U- or C-shaped first portion 44 and second portion46 may be coupled to the lower largest planar surfaces of each of thesemiconductor die rather than their upper largest planar surfaces. Thesame two U- or C-shaped structures may also be employed as a temporarydie support for a two or more thinned semiconductor die in the samevarious coupling locations previously described in variousimplementations.

Referring to FIG. 6, a group of three separate semiconductor die 52, 54,56 is illustrated where at least one of the die 54 has a differentindividual die and the group has a non-rectangular shape to itsperimeter. An implementation of a temporary die support 58 is coupled tothe upper largest planar surfaces of each die 52, 54, 56. In thisimplementation, the temporary die support 58 is used to maintain thewarpage of each of the die 52, 54, 56 below a desired value until thedie are attached to a substrate or other support and the need for thetemporary die support 58 is no longer needed and it is removed.

Referring to FIG. 7, an implementation of a permanent multichip diesupport structure 60 is illustrated. In this implementation, thestructure 60 is formed of two intersecting lines of material, which areillustrated to be symmetric in at least one axis. In otherimplementations, however, the shape of the permanent die supportstructure 60 may be asymmetric about one or all axes. The locationsalong the upper or lower planar surfaces of the group of fivesemiconductor die 61, 62, 63, 64, 65 at which the structure 58 iscoupled to the die may be determined by calculations based on, bynon-limiting example, individual die size, individual die surface area,individual die shape, localized film properties, localized stressgradients, location(s) of semiconductor devices on/within the die, diethickness, die thickness uniformity, and any other parameter affectingthe warpage of an individual semiconductor die. Also, in thisimplementation of a permanent die support structure 60, the length,orientation, and or position of each of the projections 66, 68, 70, 72of the structure 60 may be calculated and/or determined using any of thepreviously mentioned parameters affecting the warpage of each of thedie. In FIG. 7, the permanent die support 60 is illustrated with roundedside walls. However, in various implementations, different side wallprofiles having straight or substantially straight side walls may beemployed. In various implementations, the side wall profile of thepermanent die support 60 may also be calculated/determined using any ofthe previously mentioned parameters that affect the warpage of a groupof semiconductor die disclosed in this document. Various implementationsof temporary die support structures may also utilize any of theaforementioned permanent die structures.

Various permanent and temporary die support implementations may take theform of a rod/long rectangle with straight or substantially straightside walls. As previously discussed, the profile of the side walls maybe changed to assist in reducing the warpage of each die in a multichipmodule as can the location of the support and its orientation relativeto the perimeter of the die. In various implementations, the rod may notbe straight, but may be curved in one or more places to form, bynon-limiting example, a C-shape, a U-shape, an S-shape, an N-shape, anM-shape, a W-shape, or any other curved or angled shape formed from onecontinuous piece of material (see FIG. 6).

In other implementations of permanent or temporary multichip diesupports like those disclosed in this document, die support structureswith a central portion from which a plurality of ribs project may beutilized. The number, location, and position of the ribs along thecentral portion may be determined/calculated using any of the previouslydiscussed parameters that affect the warpage of each of thesemiconductor die. The side wall profile of any or all of the ribsand/or the central portion may also be calculated in a similar way usingthe previously discussed parameters.

In various implementations, the temporary or permanent multichip diesupport need not be a shape with straight edges/lines, but, like theimplementation of a temporary die support 74 illustrated in FIG. 8, mayinclude an elliptical or spherical shape. In this implementation, theoverall three-dimensional shape of the die support 74 is that of arounded ring as the side wall profile of the material of the ring isrounded. In other implementations, however, the overallthree-dimensional shape of the support 74 may be, by non-limitingexample, a ring with straight or substantially straight sidewalls,cylindrical with straight side walls, conical with angled side walls,frustoconical with straight side walls and a flat upper surface, or anyother three dimensional shape that is formed by projecting an ellipticalcross-sectional shape upward from the largest planar surfaces of a groupof separate die 76, 77, 78, 79.

In various implementations of temporary or permanent multichip diesupports, various triangular shapes may be utilized. For those supportsthat are triangular, the shape of the triangle may be acute, right,obtuse, equilateral, isosceles, or scalene in various implementations.As in the previously discussed, the side wall profile of the triangleand the placement of the die support along the largest planar surface ofeach semiconductor die in a multichip module may be determined by any ofthe previously mentioned parameters that affect the warpage of each die.

Referring to FIG. 9, in various implementation of temporary or permanentmultichip die supports the shape of the die support 80 may be irregularas determined by what is calculated to minimize the warpage of aparticular configuration of multiple die. In the implementationillustrated, the two die 82, 84 are of different sizes, and so the diesupport 80 is designed to contact both but in different locations inorder to minimize the warpage of the largest planar surfaces of eachdie. The sidewall profile of the die support 80, like previouslydiscussed, is rounded as determined by what is needed to minimize thewarpage of the largest planar surface of each die.

In various implementations, the permanent or temporary multichip diesupport can include more than one portion that is not directly attachedto any other portion (see FIG. 5). In various implementations, thespecific placement, sizing, and side wall profile of each of theportions may be determined by any of the previously mentioned parametersaffecting warpage of each die in a multichip module. While inimplementation illustrated in FIG. 5, the first portion 44 and secondportion 46 are coupled to the largest planar surfaces of the die 48, 50in other implementations the different portions may be coupled on/at thethickness of the various semiconductor die in a manner similar to theimplementation illustrated in FIG. 4. In some implementations, first,second, third, and fourth portions may be coupled around each corner ofthe various separate die at the thickness of each of the semiconductordie. In other implementations, four portions may be included but may becoupled at the thickness at the midpoint of each side of the separatesemiconductor die. In various implementations, portions coupled at thethickness may take a variety of other shapes, including, by non-limitingexample, semicircular, triangular, square, angled, or any other closedshape. In other implementations, a single permanent or temporary diesupport structure may be coupled along a side of the separatesemiconductor die at their thickness; in others, the single permanent ortemporary die support structure may be coupled on a side and may wraparound one or more corners of the semiconductor die.

In various implementations of temporary or permanent multichip diesupports, the die support can take the form of a frame with curvedsections extending across the largest planar surfaces of the separatedie coupled through the support. The radius of curvature of the curvedsections may be determined by any of the various parameters that governwarpage disclosed in this document. While the curved sections may besymmetrically distributed about the frame, in various implementationsthey may be, by non-limiting example, asymmetric about one or more axes,have different radii of curvature, extend from any side of the frame,include one or more sections, extend nearly across the dimension of theframe, or be placed as determined by any of the parameters that controlwarpage of semiconductor die disclosed in this document.

In various implementations of permanent multichip die supports likethose disclosed herein, a permanent die support material may fullyenclose both of the largest planar surfaces and the thickness of eachsemiconductor die, as illustrated in the die support 86 illustrated inFIG. 17. Whether the die support fully encloses all six sides of eachsemiconductor die depends on the desired warpage values. In suchimplementations where the permanent die support completely covers one ormore sides of the die, as illustrated in FIGS. 16, 18, and 19 one ormore openings may be provided in/formed in the permanent die supportthrough the material of the permanent die support to allow electrical orphysical connections with one or more of the group of die. In variousimplementations, the openings to expose the electrical connectors forthe various die in the multichip module may be formed by laseretching/ablating the material of the die support using a laser. In otherimplementations, the openings may be formed by chemically/plasma etchingthe material of the die support using a wet/dry/plasma etching processin various implementations. In the permanent die support implementation88 illustrated in FIG. 18, four separate die are coupled through thesupport and the same die pad/lead of each die has an opening providedthrough the material. In the implementation of a permanent die support90 illustrated in FIG. 19 of the four separate die, three have similarlyshaped portions exposed through openings 92, 94, 96 that have the samewhile one has an opening 98 that is differently sized so the desiredlocation on this die for the multichip module is exposed for electricaland/or physical contact. FIG. 16 illustrates a temporary die support 100coupled to four die 101, 102, 103, 104 which shows that the die supportcompletely covers five of the six sides of each die to provide thedesired warpage control. In this implementation, the surface of thetemporary die support 100 may be flush or substantially flush with thelargest planar surfaces of each die as an aid in bonding each die to asubstrate or other support disclosed in this document.

In various other implementations, permanent or temporary multichip diesupport material may extend over the thicknesses and the two largestplanar surfaces of the semiconductor die. In such implementations,electrical and physical connections made be formed via the exposedlargest planar surfaces and/or through openings in the material of thedie support. A wide variety of possible configurations may beconstructed to form electrical and physical connections with variousseparate semiconductor die to which a permanent or temporary die supportlike any disclosed in this document using the principles disclosedherein. In various implementations, the permanent die support materialmay be conformal, or conform to the shape of the die over which thematerial is coupled. In other implementations, the die support materialmay be non-conformal forming its own shape rather than assuming part ofthe shape of the die. In various implementations, the permanent diesupport material may be applied as a coating to the semiconductor die.

Referring to FIG. 10, in various implementations, a thickness 106 of thedie support material 110 may be thinner than a thickness 108 of both ofthe semiconductor die 112, 114. While in FIG. 10 the thickness of thedie 112, 114 is illustrated as being the same, in other implementations,the thickness of one, all, or any of the semiconductor multichip modulesdisclosed in this document may be differ from each other. In otherimplementations, as illustrated in FIG. 11, a thickness 116 of the diesupport material 118 may be thicker than a thickness 120 of eachsemiconductor 122, 124. The particular thickness and uniformity of thethickness of the die support material over the surfaces of each of thedie may be determined using any of the factors influencing the warpageof a die disclosed herein.

Referring to FIG. 12, an implementation of a permanent multichip diesupport 126 is illustrated. In this die support 126, six separate dieare coupled together, with the material of the die support 126 acting asan electrical isolation between each of the die. In this implementation,the material of the permanent die support 126 is a mold compound. Asillustrated, a largest planar side of each die is exposed from thematerial of the permanent die support 126, allowing various electricalconnections and/or physical connections to be made between the variousdie and a substrate or other structure to which the die will be coupledin subsequent packaging operations. Referring to FIG. 13, the diesupport 126 is illustrated coupled with a substrate 128 designed to bepart of a power integration module. In this implementation, press fitpins 130 are coupled to traces 132 on the substrate. In thisimplementation, the permanent die support 126 forms a multichip moduleand has been bonded to the substrate on the side of the support that ismade of mold compound. In such an implementation, any of the variousthermally enhancing fillers, particles, and other materials may be addedto the mold compound to facilitate heat transfer from the die throughthe mold compound to the substrate 128. In this implementation, variouselectrical connectors may be used to electrically couple the six diewith the traces 132 of the substrate 128, such as, by non-limitingexample, wirebonds, clips, wires, and any other electrical connectortype.

In other implementations, the side of the permanent die support 126 thathas the exposed die may be coupled to the substrate 128 as a multichipmodule. In such implementations the die may be, by non-limiting example,flip chip bonded, ball grid bonded, land grid bonded, pin grid bonded,soldered, bonded using an interposer, or any other method or process offorming electrical connections between the electrical connectors on thedie with the substrate. A wide variety of multichip modules may beconstructed using any of the permanent die supports or temporary diesupports using the principles disclosed in this document. The dieincluded in the permanent die support 126 may be power and/or controldie in various implementations.

In other implementations, a multichip module may be formed using apermanent die support to create an array of image sensor die. Referringto FIG. 14, a plurality of image sensor die 134 may be coupled withpermanent die support 136 to form an array of image sensor die as amultichip module. Referring to FIG. 15, the plurality of image sensordie 134 are now illustrated after an optically transmissive cover 138has been coupled over the die, permitting various wavelengths of lightto be received by the image sensor die 134. The permanent die support136 may permit the thinned image sensor die 134 to be utilized bycontrolling the warpage of each die and 1) enable increased image sensorquality control and/or 2) enable high accuracy of placement of eachimage sensor die 134 relative to the others to enable image stitching tobe accomplished among the plurality of die 134. A wide variety ofpossibilities for assembling various image sensor die may be constructedusing the principles disclosed in this document.

The various implementations of permanent and temporary multichip diesupport structures disclosed herein may be formed using various methodsof forming a die support structure. In a particular methodimplementation, the method includes permanently or temporarily couplinga material with two or more semiconductor die. This material may be amold compound or any other material disclosed in this document used toform a permanent die support structure. This material may also be anymaterial disclosed in this document used to form a temporary die supportstructure. The two or more semiconductor die may be any type disclosedherein that each include two largest planar surfaces with a thicknessbetween the surfaces and the thickness may be any thickness disclosed inthis document. The semiconductor device(s) included on the two or moresemiconductor die may be any disclosed in this document. At the timewhere the material is permanently or temporarily coupled with the two ormore semiconductor die, the material may be coupled with any, all, orany combination of a largest planar surface or thickness of the two ormore die. The method includes reducing a warpage of a largest planarsurface of each of the two or more semiconductor die to less than 50microns through the coupling the material. In particular implementationsthe method may include reducing a warpage of a largest planar surface ofeach of the two or more semiconductor die to less than 25 microns.

As disclosed in this document, in various method implementations, themethod includes permanently or temporarily coupling (or temporarily andpermanently coupling in some implementations) two or more portions ofmaterial to the two or more semiconductor die to one, all, or anycombination of the largest planar surface of each die or the thicknessof each die. In various method implementations, the method may includepermanently or temporarily coupling a second layer of material over thematerial originally permanently coupled with the semiconductor die.Additional layers beyond the second layer may also be coupled over thesecond layer in various method implementations.

In various method implementations, the point during the processing ofthe two or more semiconductor die where the permanent multichip diesupport structure is coupled may vary from implementation toimplementation. In some method implementations, the point at where thepermanent die support structure is applied occurs after (or could occurbefore) the semiconductor die have been physically singulated from amongthe plurality of semiconductor die being formed on a semiconductorsubstrate. Similarly, in various method implementations, the point inprocessing where a temporary multichip die support structure is coupledmay vary from implementation to implementation. In some implementationsthe temporary die support may be attached prior to attachment of the twoor more die to a substrate or other attachment structure, at which pointthe temporary die support is removed.

Referring to FIG. 20, two die 140, 142 are illustrated after couplingwith a temporary multichip die support 144. As illustrated, the two dieare separate in the temporary die support 144 and separated by gap 146.As illustrated in this implementation, the die support 144 may couple toboth a largest planar surface 148 of each die and to a thickness 150 ofeach die.

Referring to FIG. 21, an implementation of a permanent multichip diesupport 152 is illustrated prior to coupling of die thereto. Referringto FIG. 22, an implementation of the permanent die support 152 isillustrated with die 154 coupled thereto. In this implementation, thedie 154 may be bonded to the permanent die support 152 in a variety ofways, including, by non-limiting example, using a die bonding material,a die attach material, curing the material of the die support in contactwith the die, sintering the material of the die support with thematerial of the die, and any other method of coupling a die with anothermaterial. After coupling of the die with the permanent die support 152,the system is now a multichip module. Referring to FIG. 23, themultichip module 156 is illustrated where an additional temporary diesupport 158, 160, 162, 164 has been coupled to each of the die 154. Inthis way, additional warpage control of the thinned die 154 may beaccomplished during subsequent packaging steps involving the multichipmodule 156. In other implementations, however, the temporary diesupports may not be utilized.

In various implementations, the ability to couple the separate die usinga permanent or temporary die support may allow for very accurateplacement of the die in a die module. This may allow a density of die inthe module to increase. Also, in various implementations, reduction ofpick and place steps can result from the use of permanent and/ortemporary die supports because the die needed for a given product willalready be coupled together as a module at the die attach step. Also, invarious implementations, less spacing between the individual die in themodule may need to be provided due to the increased accuracy ofplacement. In various implementations, and as discussed herein,additional electrical isolation materials or isolation trenches may needto be provided between the die in a die module. The additional isolationmaterials may be coupled to the permanent or temporary die support invarious implementations. For example, the additional isolation materialsmay be any mold compound or temporary support material or other organicmaterial disclosed herein. The additional isolation materials may beapplied between the die prior to application of the permanent ortemporary die support using a variety of methods, including, bynon-limiting example, stencil printing, screen printing, squeegeeapplication, or any other technique for applying material between thedie. In other implementations, the additional isolation materials may beapplied to or applied with the material of the permanent or temporarydie support in the molding/support application process. In otherimplementations, however, the additional isolation materials may be, inthe case of permanent die supports, the die support material itself thatextends between the die.

Referring to FIG. 24, a side view of a jig/mold/guide 166 is illustratedwith a plurality of thinned die 168 coupled therein. FIG. 25 illustratesthe jig 166 after two implementations of temporary multichip die supportstructures 170, 172 are coupled to pairs of thinned die using thestructure of the jig 166 as a support. In this way, the temporarymultichip die support is able to reduce the warpage of each of the pairsof die 168 during further packaging processing steps.

In various method implementations, the temporary or permanent multichipdie supports may be coupled prior to or after probing of the individualdie/groups of die. Similarly, the temporary or permanent multichip diesupports may be applied to a plurality of die on a semiconductorsubstrate prior to or after probing the plurality of die/groups of die.

Referring to FIG. 26, an implementation of a jig 174 is illustrated withthree separate thinned die 176 coupled into openings 178 thereto after apermanent multichip die support 180 has been coupled thereto. In theimplementation illustrated in FIG. 26 the material of the permanentmultichip die support 180 does not penetrate down into the openings 178along the thickness of each of the thinned die 176. In otherimplementations, however, particularly where a molding process is usedto form the permanent die support, the material of the permanent diesupport 180 may extend partially or fully across the thickness of thethinned die. A wide variety of jig types may be constructed using theprinciples disclosed herein to enable the formation of various multichipmodules using any of the various methods of applying a permanent ortemporary dies support disclosed in this document.

In various method implementations, no precut or partial grooving betweenthe plurality of die of a semiconductor substrate may be carried out.Where the plurality of die will be thinned, the depth of the die/sawstreets/scribe lines may be sufficient to carry out the various methodsof forming semiconductor packages disclosed herein. For example where asemiconductor substrate will be thinned to about 10 microns, the about 5micron depth of the die streets into the material of the substrate/dieresulting from the processing steps that form the separate semiconductordie suffices to act as the equivalent of any partialgrooving/precutting. In various implementations, permanent or temporarymultichip die support structures may be applied over the die leavingspecific die streets exposed for subsequent processing.

In particular method implementations, the depth of the exposed diestreets can be increased during the die fabrication process. In otherparticular method implementations, the depth of the exposed die streetsmay be increased during die preparation/packaging processes followingdie fabrication. In this way, any separate precut or partial grooving ofthe wafer using a saw or other process may be rendered unnecessary.Avoiding separately precutting/partial grooving may facilitate thesawing process and/or eliminate risk of sidewall cracking due tocoefficient of thermal expansion (CTE) mismatches. While using the depthof the die streets to set sidewall coverage of mold compound rather thanthe depth of a precut into the semiconductor substrate may reduce thepartial sidewall coverage for each die, the benefits may outweigh theadditional coverage in various method implementations.

In various method implementations, temporary or permanent multichip diesupport structures may be coupled to the plurality of die while thesemiconductor substrate while it is at full thickness, or, in otherwords, prior to any thinning operations being performed. Additionalthinning operations can then be initiated with the temporary orpermanent multichip die support structures in place. Also, for thoseprocesses where precut/grooving operations take place prior to thinning,these steps can take place after coupling of the temporary or permanentmultichip die support structures.

In various method implementations, temporary or permanent multichip diesupport structures may be coupled over separated die after thinning isperformed. In other implementations, the temporary or permanentmultichip die support structures may be applied over the separated dieafter backmetal layer(s) have been applied to the semiconductorsubstrate. In yet other method implementations, the temporary orpermanent multichip die support structures may be applied over theseparated die after the semiconductor substrate has been only partiallythinned, such as, by non-limiting example, through removing backsideoxide prior to probing, an initial grinding step prior to apolishing/lapping step, or any other process which partially removes alayer of material or bulk material from the side of the semiconductorsubstrate opposite the die.

In various method implementations, the temporary or permanent multichipdie support structures may be applied over the separated semiconductordie after a full backgrinding process is carried out but prior to orafter a stress relief wet etching process has been carried out. In suchimplementations, the stress relief wet etching may be carried out withor without backmetal. In some implementations, the stress relief wetetching make take place after protecting the front side (die side) ofthe semiconductor substrate. The stress relief etching may reduce thebackside damage to the semiconductor substrate that is caused by thebackgrinding process. The use of the stress relief etching may alsofacilitate adhesion of the backmetal applied to the ground surface. Invarious implementations, the application of the temporary or permanentdie support structures may be carried out prior to a backmetal formationprocess. A wide variety of sequences of method steps involving couplingof temporary or permanent die support structures may be carried outusing the principles disclosed in this document for packaging processinvolving wafer scale operations like those disclosed in this documentused for semiconductor substrates.

In various implementations, temporary or permanent multichip die supportstructures may be applied to a thinned semiconductor substrate prior tosingulation of the thinned semiconductor die. In other implementations,temporary or permanent multichip die support structures may be coupledwith the groups of thinned die after singulation but before picking ofthe thinned die while the thinned die are still supported on dicingtape. A wide variety of potential options may exist for the timing ofwhen the temporary or permanent multichip support structures may beapplied to the die during wafer scale packaging operations.

Similarly to the timing of applying temporary or permanent multichip diesupport structures during methods of wafer scale packaging semiconductordie, the timing may vary in various implementations of chip scalepackaging semiconductor die. For example, a temporary or a permanentmultichip die support structure may be applied individually to two ormore die to form a multichip module. Temporary or permanent multichipdie supports may be applied as the first step following die picking froma singulation tape, or immediately following die singulation prior topicking. In other method implementations, a temporary or permanent diesupport structure may be applied at or just prior to a later step in theprocess, such as, by non-limiting example, die attach, die underfilling,flux washing, epoxy cure, prior to a full encapsulating step, after leadframe attach, or any other chip scale packaging process operation. Invarious implementations, temporary die multichip supports may generallybe applied prior to die attach, as after die attach there may be nofurther need for the temporary multichip die support. A wide variety ofsequences of method steps involving coupling a temporary or permanentmultichip die support structures may be employed in various methodimplementations using the principles disclosed in this document.

A wide variety of methods and processes may be employed to remove thetemporary multichip die supports from the multichip modules at the pointin the process where the temporary supports are no longer needed.Various implementations of temporary multichip die supports may bepeeled off of the surface of multichip modules after or during exposurefrom a light source. This light source may be, by non-limiting example,a visible light source, an infrared light source, an ultraviolet lightsource, a laser light source, or any other source of light capable ofacting to release or assist in releasing the temporary die support. Forexample, if the temporary die support was a UV release tape, then thesupport could be peeled from the surface of the multichip module withthinned die following exposure to a UV light source for a predeterminedperiod of time after the multichip module had been attached to, bynon-limiting example, a substrate, leadframe, another die, a lead, aredistribution layer, any combination thereof, or any other die bondingstructure.

In various implementations, temporary multichip die supports may beetched from a multichip module using a plasma etching source. While aplasma etching source may be used, any other etching process could beemployed in various implementations, including, by non-limiting example,a wet etching process, a spray etching process, a reactive ion etchingprocess, an ion bombardment process, a lasering process, a grindingprocess, or any other process capable of reacting away or ablating thematerial of the temporary multichip die support.

In other implementations, the temporary multichip die support may beremoved using energy assisting processes. In various implementations, atemporary die support may be separated from a multichip module withthinned die in a bath under ultrasonic energy produced by ultrasonicenergy source. Under the influence of the compression waves in the fluidof the bath, the temporary multichip die support may separate withoutrequiring any pulling force, or the peeling of the temporary multichipdie support may be enabled by the ultrasonic energy. While the use of abath 238 is illustrated, in various implementations a puddle may beused. In still other implementations, the ultrasonic energy may bedirectly or indirectly applied to the multichip module through aspindle, a chuck, a plate, or a liquid stream. In variousimplementations, the source of sonic energy may range from about 20 kHzto about 3 GHz. Where the sonic frequencies utilized by the ultrasonicenergy source are above 360 kHz, the energy source may also be referredto as a megasonic energy source. In particular implementations, thesonic energy source may generate ultrasonic vibrations at a frequency of40 kHz at a power of 80 W. In various implementations, the sonic energysource may apply a frequency of between about 30 kHz to about 50 kHz orabout 35 kHz to about 45 kHz. However, in various implementations,frequencies higher than 50 kHz may be employed, including megasonicfrequencies. A wide variety of power levels may also be employed invarious implementations.

In various semiconductor package and method implementations disclosed inthis document, any of the pads or electrical connectors disclosed inthis document may be formed, by any or any combination of the following:evaporation, sputtering, soldering together, screen printing, solderscreen printing, silver sintering one or more layers of materials. Anyof the foregoing may also be used in combination with electroplating orelectroless plating methods of forming pads and/or electricalconnectors.

In places where the description above refers to particularimplementations of multichip module supports and implementingcomponents, sub-components, methods and sub-methods, it should bereadily apparent that a number of modifications may be made withoutdeparting from the spirit thereof and that these implementations,implementing components, sub-components, methods and sub-methods may beapplied to other multichip module supports.

1. A semiconductor device comprising: a first semiconductor die; asecond semiconductor die; and one of a permanent die support structure,a temporary die support structure, or any combination thereof coupled tothe first semiconductor die and to the second semiconductor die at alargest planar surface, a thickness, or any combination thereof of eachof the first semiconductor die and the second semiconductor die; whereinthe largest planar surface of the first semiconductor die and a largestplanar surface of the second semiconductor die lie in a same plane;wherein the first semiconductor die is coupled to the secondsemiconductor die through the one of a permanent die support structure,a temporary die support structure, or any combination thereof; andwherein a warpage of the largest planar surface is less than 200microns.
 2. The device of claim 1, wherein the thickness is between 0.1microns and 125 microns.
 3. The device of claim 1, wherein a perimeterof the first semiconductor die or the second semiconductor die isrectangular and a size of the first semiconductor die or the secondsemiconductor die is at least 6 mm by 6 mm.
 4. The device of claim 1,wherein a perimeter of the first semiconductor die or the secondsemiconductor die is rectangular and a size of the first semiconductordie or the second semiconductor die is 211 mm by 211 mm or smaller. 5.The device of claim 1, wherein the permanent die support structurecomprises a mold compound.
 6. The device of claim 1, wherein a perimeterof the first semiconductor die comprises a closed shape and a perimeterof the second semiconductor die comprises a closed shape.
 7. The deviceof claim 1, wherein the one of the permanent die support structure, thetemporary die support structure, or any combination thereof comprises aperimeter comprising a closed shape.
 8. The device of claim 1, furthercomprising a second permanent die support structure, a second temporarydie support structure, or any combination thereof coupled to the firstsemiconductor die and to the second semiconductor die at the largestplanar surface, the thickness, or any combination thereof of each of thefirst semiconductor die and the second semiconductor die.
 9. The deviceof claim 1, wherein the permanent die support structure, the temporarydie support structure, or any combination thereof comprises two or morelayers.
 10. A die support structure comprising: a material configured tobe one of permanently coupled or temporarily coupled to a firstsemiconductor die and to a second semiconductor die coupled together ina single semiconductor device at a largest planar surface, a thickness,or any combination thereof of each of the first semiconductor die andthe second semiconductor die; wherein the largest planar surface of thefirst semiconductor die and the largest planar surface the secondsemiconductor die lie in a same plane; wherein the thickness is between0.1 microns and 125 microns.
 11. The die support structure of claim 10,wherein the material is configured to reduce a warpage of the largestplanar surface to less than 200 microns.
 12. The die support structureof claim 10, wherein the material is a mold compound.
 13. The diesupport structure of claim 10, wherein the material is configured to beremovable by one of exposure to light, ultrasonic energy, peeling,etching, grinding, or any combination thereof.
 14. The die supportstructure of claim 10, wherein the material comprises a perimetercomprising a closed shape.
 15. The die support structure of claim 10,wherein the material is a first portion of material and furthercomprising a second portion of material configured to be coupled to thelargest planar surface, the thickness, or any combination thereof.16-20. (canceled)